Tescan Sem Fib-sem With Integrated Raman Spectrometry User Manual

TESCAN ORSAY HOLDING, a.s.
Joint stock company
IndustryScientific and technical instruments
Founded17 July 1991
Headquarters
Brno
,
Area served
Global
CEO | Jaroslav Klíma
ProductsScanning electron microscope, Focus-Ion Beam Scanning Electron Microscope (FIB-SEM), X-ray CT systems
Revenue1,715,682,000 Czech koruna (2016)
143,448,000 Czech koruna (2016)
92,887,000 Czech koruna (2016[1])
Total assets3,114,946,000 Czech koruna (31 December 2016)
Number of employees
over 500
Subsidiarieshttps://www.tescan-orsay.com/subsidiaries
Websitewww.tescan.com
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TESCAN also offers field emission (FE) SEM systems equipped with high brightness Schottky emitter for achieving high-resolution and low-noise imaging. MIRA3 is a high-resolution FE-SEM while MAIA3 is an ultra-high resolution (UHR) FE-SEM. The new microscopes, from the S8000 and S9000 Series, complement the list. Jul 23, 2018  TESCAN instruments and the user interface have different levels – from a very basic one to full functionality that includes advanced patterning for electron and ion microscopy applications or 3D analysis. Cryogen-Free Sub-Kelvin Angle-Resolved Photoemission Spectroscopy System. TESCAN SEM/FIB-SEM with Integrated Raman Spectrometry.

TESCAN is one of the world's leading manufacturers[2] of Scanning Electron Microscopes (SEM) and Focused Ion Beam-Scanning Electron Microscopes (FIB-SEM).[3] They have a comprehensive range of instruments that can be customized to meet the specific customer requirements. TESCAN is located in Brno (Czech Republic), which is considered to be the cradle of electron microscopy in Europe.[4]

With a rich history[5] in scanning electron microscopy that stretches back over 70 years and a strong commitment to research and development, TESCAN are at the forefront of electron microscopy boasting world firsts such as:[citation needed]

  • First to commercialize Xe plasma FIB-SEM
  • First to integrate Raman and SEM (RISE, Raman Integrated Scanning Electron microscope)
  • First to integrate TOF-SIMS into a FIB-SEM

TESCAN have now produced over 2800 SEMs and FIB-SEMs that reside in labs all over the world including world-class universities, research centers in both public sector and industry and high-tech semiconductor companies. A few examples include Max Planck Institute, Cardiff University, Imperial College, Trinity College Dublin, NASA, Volkswagen Group, Continental Automotive, Hyundai, Siemens, Posco, Samsung, LG, STMicroelectronics, Amkor, Intel, and TSMC.

With the merger with Orsay Physics, they have acquired leading focused ion beam (FIB) technology that it integrated into their FIB-SEM systems. The acquisition of XRE adds dynamic X-ray micro-CT (computed tomography) technology to their products.

TESCAN holds ISO 9001 and ISO 14001 quality certifications.

  • 5Special solutions

History[edit]

TESLA BS 242

The history of electron microscope production in Czechoslovakia dates back to the 1950s when a team lead by Armin Delong in Brno started to produce microscopes.[6] One of the first successful microscopes was the Tesla BS 242 model, which won a gold medal at the EXPO 1958.[6] During its 30-year existence, Tesla produced over 3,000 different models of microscopes which were exported to over 20 countries.

After the Velvet Revolution, Tesla was divided into several smaller companies. Some of them still operate in the electron microscope market. One of these companies is TESCAN which was founded by former Tesla development and service employees. The name TESCAN was derived from the words TESla and SCANning (scanning – screening).

TESCAN originally manufactured programmable controllers, digitizers for older analog scanning electron microscopes, and other small accessories. Today, thanks to intense and continuous commitment to research and development, TESCAN has evolved and is positioned as one of the leading worldwide producers of scanning electron microscopes and focused ion beam scanning electron microscopes, manufacturing customized and unique solutions for microanalysis in science and industry.

At the International Engineering Fair, TESCAN received the Gold Medal in 2001 for the VEGA TS 5130 MM scanning electron microscope.[7]

Product portfolio[edit]

TESCAN's portfolio comprises a comprehensive range of SEMs, FIB-SEMs and other specialized solutions based on these technologies. Including automated mineralogy and correlative microscopy with Raman spectrometry. They have also recently added dynamic X-ray micro-CT systems.[8]

SEM[edit]

TESCAN offer a complete range of SEMs fitted with high-brightness Schottky field emission emitters (FEG) and tungsten filaments. They are available in various chamber sizes that have been specifically designed to be able to cater for many different detectors to extend capabilities of the SEM according to customer requirements.

The TESCAN FEG systems include the TESCAN S8000. This microscope features the BrightBeam SEM column technology that achieves field-free ultra-high resolution (UHR) with excellent performance, especially at low beam energies while maintaining maximum versatility in sample imaging.

The list continues with the TESCAN S9000, which is equipped with the Triglav UHR SEM column. The TESCAN S9000 is based on an optimized electron optics designed to deliver ultimate resolution in the entire beam energy range. However, it its performance at low beam energies what makes this microscope a truly remarkable instrument for material nanocharacterisation.[9]

In addition, TESCAN also offers the MIRA3, a versatile, entry-level high-resolution FEG-SEM with great analytical potential, and the MAIA3 UHR FEG-SEM – a microscope for materials nanocharacterization.[10]

TESCAN portfolio includes the VEGA3, an entry-level and versatile thermionic emission SEM system with a range of optimized chamber configurations for an excellent performance-price ratio.[11]

FIB-SEM[edit]

TESCAN also offers focused ion beam scanning electron microscopes (FIB-SEMs), which can be fitted with either a Ga FIB, or Xe plasma FIB columns. The TESCAN FIB-SEM systems satisfy a wide range of applications, from basic industrial routine applications to the most advanced and challenging technological applications that demand the highest standards in imaging and micro/nanomachining workflows.[12]

The Xe plasma FIB-SEMs enable high sputtering rates that can be up to 50 times faster than those achieved by conventional Ga FIB-SEMs.[13] This makes Xe plasma FIB ideal for large-volume sample microanalysis and, in general, suitable to complete all large-volume FIB-milling tasks such as large-area cross-sectioning in short time frames.

In addition, the Xe plasma FIB enables Ga-free fabrication and sample preparation. This important feature is crucial to complete fabrication tasks and sample preparation without altering the physical electrical properties of the modified specimens. This is the case of sample preparation for the purposes of failure analysis and electrical nanoprobing of semiconductor devices and preparation of high-quality TEM specimens.

Thanks to advanced ion optics of the TESCAN Xe plasma FIB columns, resolution of < 15 nm at 30 keV can be achieved, thus precision and high-throughput can be combined in one single instrument. TESCAN offers two different Xe plasma FIB-SEM platforms, the TESCAN S9000X, and the TESCAN S8000X. The TESCAN 9000X features the Triglav SEM column while the TESCAN S8000X the BrightBeam SEM column. Thus, in terms of SEM imaging, the TESCAN 9000X delivers ultimate resolution while the TESCAN S8000X offers great versatility in imaging thanks to its field-free generated ultra-high resolution.[14][15]

Ga ion source FIBs on the other hand, can deliver a small and well-defined beam spot, and are capable of achieving resolution of < 2.5 nm at 30 keV. These most suited for the most delicate and challenging tasks of nanofabrication and sample preparation where ultimate precision is crucial. That is the case of nanopatterning and advanced preparation of ultra-thin TEM specimens with thicknesses that can be of < 10 nm.

Manual

The TESCAN portfolio of Ga FIB-SEMs includes the TESCAN LYRA3, a versatile, entry-level and high-performance FIB-SEM. The list continues with the TESCAN S8000G and the TESCAN S9000G, which are aimed at high-end FIB-SEM applications. The former delivers maximum versatility and quality in sample preparation while the latter offers ultimate capabilities in both SEM and FIB to complete the most challenging nanofabrication tasks.

Ion columnFIB-SEM
Ga FIB-SEMsCanion – high-performance Ga ion source FIB column[16]

TESCAN LYRA3

Cobra – high-resolution Ga ion source FIB
Orage – high-resolution Ga ion column with extended ion beam current range, optimized for low energy operations, piezo-driven aperture changer, and automated maintenance functions

TESCAN S8000G, TESCAN S9000G

Xe plasma FIB-SEMiFIB+ – ECR source technology Xe plasma FIB column

HR-iFIB+ – ECR source technology, high-resolution Xe plasma FIB column

TESCAN S8000X, TESCAN S9000X

Special solutions[edit]

TESCAN specializes in developing unique and tailored solutions for SEM and FIB-SEM applications to best fit specific needs for sample analysis in diverse fields of science and technology such as materials science, biomedicine, geology, paleontology, forensic sciences as well as the automotive and aeronautic industries, mining and mineral processing industries.

TIMA-X TESCAN Integrated Mineral Analyzer[edit]

TIMA-X is an automated mineralogy system for fast quantitative analysis of samples such as rocks, ores, concentrates, tailings, leach residues or smelter products.[17] It has been designed for mine site operations where it can be integrated across the entire workflow but has also been adopted by many leading mining and geology schools across the globe.

TIMA-X combines BSE and EDX analyses to identify minerals and create mineral images that are analyzed to determine mineral concentrations, elemental distributions, and mineral texture properties such as grain-size, association, liberation and locking parameters. TIMA-X can also search for bright phases containing platinum group, gold, silver, rare earth and other minerals.

For high-throughput applications, it can be converted into a fully autonomous system with no user intervention required with the addition of a 100-sample robotic AutoLoader. This eliminates the need for manual sample exchanges and chamber pump-down.

TESCAN SEM/FIB-SEM with integrated Raman spectrometry (RISE)[edit]

The fully integrated correlative Raman imaging and scanning electron microscopy for comprehensive sample analysis is a novel correlative microscopy technique.[18] Through Raman imaging and scanning electron microscopy ultra-structural surface properties can be linked to molecular compound information.

X-ray micro-CT systems[edit]

TESCAN's portfolio now includes leading-edge 3D X-ray CT systems designed to meet specific application demands, combined with a powerful suite of software solutions that facilitate image acquisition, 3D reconstruction, 3D visualization, and quantification in very short timeframes.

Tescan Sem Fib-sem With Integrated Raman Spectrometry User Manual Video

TESCAN has 3 specialized XRE X-ray CT systems designed to fulfil particular needs:

  • CoreTOM – modular and versatile high-resolution 3D X-Ray Imaging
  • DynaTOM - 3D X-Ray imaging from core to pore
  • UniTOM – high temporal resolution 4D X-Ray Imaging

Holding structure[edit]

TESCAN has come a long way since the 1990s. Continuous development and research combined with vision and innovation has resulted in a comprehensive range of products that cater to all facets of science including nanotechnology.

Tescan Sem Fib-sem With Integrated Raman Spectrometry User Manual Pdf

In 2013, TESCAN ORSAY HOLDING was established following the merger of the Czech company TESCAN, a leading global developer and supplier of scanning electron microscopes (SEMs) and focused ion beam (FIB) workstations, and the French company ORSAY PHYSICS, a world leader in customized Focused Ion Beam and Electron Beam technology.[19]

Tescan Sem Fib-sem With Integrated Raman Spectrometry User Manual Free

The headquarters of the TESCAN ORSAY HOLDING is located in Brno, The Czech Republic. This location serves as the base for production and research and development of all microscopes. From this, about 95% of the total production is exported to locations all over the world via local subsidiaries and distributors.

TESCAN ORSAY HOLDING comprises 7 subsidiaries located in Europe, Asia and the Americas that together employ almost 500 people. TESCAN manufactures about 250 microscopes per year yielding revenue of approximately US$80 million per annum.

Tescan Sem Fib-sem With Integrated Raman Spectrometry User Manual System

Subsidiaries[edit]

Tescan Sem Fib-sem With Integrated Raman Spectrometry User Manual Online

To cater for growth into new territories, TESCAN has opened 7 subsidiaries. These regional offices have been established to provide prompt and efficient support and high-quality service. They are staffed by electron microscopy experts any many have in-house demonstration labs with fully functioning instruments.

  • TESCAN CHINA, Ltd. – Founded in 2009 and headquartered in the well-known high-tech development area of Shanghai Caohejing and supported by branch offices in Beijing, Wuhan, Guangzhou, Chongqing and Shenyang.
  • TESCAN USA, Inc. – Acquired in 2010, serves the North American region.
  • TESCAN-UK, Ltd. - Established in 2013 and Based in Cambridge and covering the UK and Republic ofIreland.
  • TESCAN ORSAY FRANCE S.A.R.L. - Established in 2014 and based in Fuveau.
  • TESCAN BENELUX – Established in 2015, serves the regions of Belgium, Luxembourg and the Netherlands.
  • TESCAN do BRASIL – Established in 2015, based in Sao Bernardo do Campo, Brazil and services the South American region.
  • TESCAN GmbH - Established in 2018, caters to the needs of Germany, Austria and Switzerland.
  • TESCAN Analytics – Established in 2017 and based in Provence.
  • TESCAN XRE - Established in 2018 via acquisition of XRE NV, based in Ghent, Belgium.
  • TESCAN 3DIM - Established in 2017
  • TESCAN TEMPE – Acquired in 2015 (former AppFive, LCC). USA-based partner for innovation and tool development in microscopy. AppFive specializes in developing software framework technology and ultra-fast, domain specific application development.

Gallery[edit]

References[edit]

  1. ^https://or.justice.cz/ias/content/download?id=e3896050c08647f49199d258b955b6c9.
  2. ^'Tescan | Wirsam Scientific'. www.wirsam.com. Retrieved 17 April 2019.
  3. ^'TESCAN ORSAY HOLDING'. Research & Development in the Czech Republic. Retrieved 12 April 2019.
  4. ^'Winemaking under the electron microscope'. labonline.com.au. Retrieved 17 April 2019.
  5. ^'BRNO: PROMISED LAND OF ELECTRON MICROSCOPY'.
  6. ^ ab'Armin the extraordinary'.
  7. ^'TESCAN History'.
  8. ^'Product portfolio'.
  9. ^'TESCAN SEM'.
  10. ^'Mira'. www.mikrolux.hr. Retrieved 17 April 2019.
  11. ^'TESCAN VEGA3'.
  12. ^'TESCAN FIB-SEM'.
  13. ^'Novel plasma FIB/SEM for high speed failure analysis, 3D tomography and other applications'.
  14. ^'TESCAN S8000X'.
  15. ^'TESCAN S9000X'.
  16. ^'Canion column'.
  17. ^'Tescan installs TIMA-X in China | Microscopy and Analysis'. microscopy-analysis.com. Retrieved 25 April 2019.
  18. ^'RAMAN SEM | NanoNordic'. www.nanonordicab.se. Retrieved 25 April 2019.
  19. ^'Research and Development in Czech Republic'(PDF).

External links[edit]

Tescan Sem Fib-sem With Integrated Raman Spectrometry User Manual 2016

Coordinates: 49°11′21″N16°31′57″E / 49.189143°N 16.532607°E

Tescan Sem Fib-sem With Integrated Raman Spectrometry User Manual 2017

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